JPH0621166Y2 - 走査型表面仕事関数計測装置 - Google Patents

走査型表面仕事関数計測装置

Info

Publication number
JPH0621166Y2
JPH0621166Y2 JP1990005201U JP520190U JPH0621166Y2 JP H0621166 Y2 JPH0621166 Y2 JP H0621166Y2 JP 1990005201 U JP1990005201 U JP 1990005201U JP 520190 U JP520190 U JP 520190U JP H0621166 Y2 JPH0621166 Y2 JP H0621166Y2
Authority
JP
Japan
Prior art keywords
signal
sample
work function
tunnel current
drive signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990005201U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0395549U (en]
Inventor
洋志 徳本
重夫 岡山
春樹 中川
昭彦 本間
Original Assignee
工業技術院長
株式会社小坂研究所
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, 株式会社小坂研究所, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1990005201U priority Critical patent/JPH0621166Y2/ja
Publication of JPH0395549U publication Critical patent/JPH0395549U/ja
Application granted granted Critical
Publication of JPH0621166Y2 publication Critical patent/JPH0621166Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990005201U 1990-01-23 1990-01-23 走査型表面仕事関数計測装置 Expired - Lifetime JPH0621166Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990005201U JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990005201U JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Publications (2)

Publication Number Publication Date
JPH0395549U JPH0395549U (en]) 1991-09-30
JPH0621166Y2 true JPH0621166Y2 (ja) 1994-06-01

Family

ID=31508917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990005201U Expired - Lifetime JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Country Status (1)

Country Link
JP (1) JPH0621166Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238374A (ja) * 1985-08-14 1987-02-19 Canon Inc 電子回路の評価システム
JPH0640002B2 (ja) * 1988-03-15 1994-05-25 工業技術院長 探針位置制御方法

Also Published As

Publication number Publication date
JPH0395549U (en]) 1991-09-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term